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stract-This paper describes the development of microelectrodes th integrated three-dimensional electrode structures. The tegration of three-dimensional structures aims at an improvement the electrode/tissue interface. Due to the increase in surface area e electrode impedance is reduced, while the density of icroelectrodes per area remains the same as with flat electrodes. o different types of electrodes have been developed: Flexible, plantable microelectrodes with pyramidal, protruding structures d tip-shaped electrode arrays on glass substrates. The protrusion ights of the electrode sites can easily be adjusted depending on the tual application. For the flexible structures we used a polyimidesed process to fabricate microelectrodes with sharp or flat ramidal tips and with electrode arrangements on front and ckside of the devices. The tip-shaped electrode arrays were bricated from a glass substrate by isotropic wet chemical etching d subsequent metallization and passivation. Data from impedance easurements and acute brain slice recordings indicate a nsiderable improvement regarding electrode impedance and tainable signal strength. ywords – Three-dimensional, Electrode array, Microelectrodes, lyimide, Glass